Research Director

Outline

The purpose of this research is to develop a small-sized vibration energy harvesting device that converts environmental vibration energy into mW-class electric energy by combining electret packaging and CMOS-MEMS technology. The proposed energy harvesting device integrates multilayer electrets, high-density metal movable electrodes, peripheral circuits, and sensors, which enables us to realize a novel vibration energy harvester for self-powered environmental sensors.