[Isaku Kanno]Development of high-efficient piezoelectric MEMS energy harvesters composed of polarization-controlled lead-free piezoelectric thin films


Research Director

Isaku Kanno

Isaku Kanno

Department of Mechanical Engineering, Kobe University
Professor


Outline

This research is aiming to realize lead-free piezoelectric MEMS energy harvesters for the battery-free sensor nodes. We try to enhance piezoelectric properties by finding out the optimal polarization conditions of organic or inorganic lead-free piezoelectric thin films, especially focusing on their microstructures of polarization domain and crystal orientations. On the basis of high-performance lead-free piezoelectric thin films, we will establish the methodologies of modeling, design, and microfabrication for high-efficient lead-free piezoelectric MEMS energy harvesters for the application of battery-free sensor nodes.

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