Facilities

  • Low Temperature MicroProber 1

    DC, up to 0.9T magnetic field, 7K He Gifford-McMahon cooler

  • Low Temperature MicroProber2

    Microwave/DC, up to 0.9T magnetic field, 7K He Gifford-McMahon cooler

  • MicroProber with Vector Magnet

    3Dimensional vector magnetic field, Microwave Prober

  • Electron Spin Resonance Device

    9.6GHz Microwave

  • PPMS 1

    9T Superconductor Magnet, Vibrating Sample Magnetometers, Magnetic Torque, AC Transport Measurements, Thermodynamical Propoerty Measurements

  • Scanning Probe Microscope

    Vacuum, AFM, MFM

  • Microwave Broadband Spectroscopy

  • Example of Measument Rack

  • Low Temerature Magnetic Property Measurment

  • Optical Measurment System1

    Semiconductor Lasers, Gas Lasers, Spectroscopes, Photoelastic Modulatoer, and others

  • Digital Metallograph

  • Electron Beam Deposition with in-situ measurment system

  • Clean Room Entrance

  • Electron Lithography and Scanning Electron Microscopy

  • Electric Furnace, Thermostatic Chamber, Spin coater, Mask Aligner, and others

  • X-Ray Diffraction with 2 dimensional detector

  • Complex Deposition System1

    Ultra High Vacuum Electron Beam Deposition, Dual Source Magnetron Sputtering, Dry Etching, Substrate Heating, Omnidirectional Manipurator

  • Complex Deposition System2

    Ultra High Vacuum Electron Beam Deposition, Dual Source Magnetron Sputtering, Dry Etching

  • Laser MBE 1

    Combinatrial Synthesis, Differential Evacuation RHEED, Excimer Laser

  • Laser MBE2

    Combinatrial Synthesis, Differential Evacuation RHEED, Excimer Laser

  • Liquid Phase Epitaxy System

  • Small Ion beam Sputtering/Etching Device

  • Ultrasonic Wire Bonder

  • High Precision Scriber

  • Pattern Work System

  • High Temperature Furnace

  • Pressing Machine

  • Other Manufacturing Machines

    Spin coater, Diamond Cutter, Automatic Polisher, Drill Press, Anneal Furnace, Tublar Furnace

  • Fume Hood

  • Electronic working space