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Functional Integrated CNT Flexible Nano MEMS Devices Fabricated by Self-Assembling Processes

Research Project Outline

We would develop the fundamental fabrication process of nanotube devices and integration techniques with different materials to realize a CNT-MEMS industy in the future.We would combine the bottom-up and top-down techniques to self-assemble the nanotubes to realize CNT-MEMS devices with controlled shape and position, and designed functions.

Research Director
KenjiHata
Affiliation
Team Leader, Advanced Industrial Science and Technology
Research Started
2008
Status
ongoing
Research Area
Creation of Nanosystems with Novel Functions through Process Integration
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