Research Project Outline
The device technology of a vertical body channel MOSFET with a new concept that assumes the entire body area of the device to be its current drive area is developed. The circuit technology and material/process technology for the vertical body channel MOSFET are developed.It aims to offer a new universal technological platform for semiconductor LSI to improve the driving current characteris-tic, the leak current characteristic, and the integration density in comparison with conventional planar type MOSFET.