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Development of Nonlinear Optical Crystal for Vacuum UV Laser

Research Project Outline

The purpose of this project is to develop nonlinear optical crystal for generating VUV light at the wavelength below 180 nm in order to realize high-resolution mask and wafer inspection system. We will try to reveal the mechanism of UV laser-induced damage in nonlinear optical crystal, and to establish the shorter-wavelength and longer-lifetime VUV sources.

Research Director
TakatomoSasaki
Affiliation
Specially Appointed Professor, Osaka University
Research Started
2007
Status
ongoing
Research Area
Research of Innovative Material and Process for Creation of Next-generation Electronics Devices
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