Research Project Outline
Ionizing radiation (EUV, EB etc) is a key technology for future nanofabrication because it can deposit their energy on nanoscale region without any difficulty. Our purpose is the establishment of scientific foundation for the application of ionizing radiation to nanofabrication on industrial scale. We clarify reaction mechanisms induced in resist materials for nanofabrication by ionizing radiation. The knowledge on reaction mechanisms are applied to resist and process designs. We develop a process simulator based on reaction mechanisms.