Kazuhiro
Hono
Fellow, National Institute for Materials
Science
@To broaden the applications of the three-dimensional
atom probe (3DAP) technique for mapping
real 3D atomic distributions for a wide
variety of materials, the technical limitations
of the conventional 3DAP that stem from
the field evaporation process will be overcome
by using pulsed-laser assisted field evaporation.
A newly developed laser assisted wide angle
3DAP will be applied to nanostructure analyses
of magnetic and semiconductor materials
and their devices as well as the metallic
materials that used to be impossible to
analyze with the voltage pulsed 3DAP. At
the same time, specimen preparation techniques
that will make it possible to analyze specific
areas of various types of materials will
be developed.
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