Establishment of Process Navigation by Creation of Plasma Nano Science and Soft Material Processing

Research Project Outline

In order to realize the future nano device manufacturing, we will make the paradigm shift from plasma process by a trial and error method to that on the basis of plasma science. The desktop combinatorial plasma analysis equipment with the monitoring technique for radical density, ion density and energy is developed and using the equipment, plasma nano science is created. Moreover, we will establish the guiding principle "process navigation" by the process data map based on plasma nano science. Herewith, innovative nano process manufacturing technology for organic Soft Materials is established.

Research Director
Professor, Nagoya University
Research Started
Research Area
Establishment of Innovative Manufacturing Technology Based on Nanoscience
Research Areas by Category
Research Areas Completed
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