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Phase 1 (1期生) Phase 2 (2期生) Phase 3 (3期生)
6、Functional integration of wide bandgap semiconductors for high-performance power devices by controlling interface nanostructure
Jun Suda
1) 小野島紀夫、須田淳、松波弘之
2次元初期成長の実現によるによるSiC(0001)基板上高品質AlN層の結晶性向上
応用物理学会(2003年春期)
   
2) N. Onojima, J. Suda and H. Matsunami
High-quality AlN by initial layer-by-layer growth on surface-controlled 4H-SiC(0001) substrate
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS 42 (5A): L445-L447
   
3) N. Onojima, J. Suda and H. Matsunami
Growth of high-quality non-polar AlN on 4H-SiC (11-20) substrate by molecular-beam epitaxy
第5回窒化物半導体国際会議(ICNS5)
   
4) N. Onojima, J. Suda and H. Matsunami
Impact of SiC surface control on initial growth mode and crystalline quality of AlN grown by molecular-beam epitaxy
第5回窒化物半導体国際会議(ICNS5)
   
5) 須田淳、小野島紀夫、木本恒暢、松波弘之
界面制御によるSiC基板上AlN成長層の高品質化および新規面方位SiC上へのAlNの成長
第33回結晶成長国内会議(NCCG-33)
   
6) 小野島紀夫、須田淳、木本恒暢、松波 弘之
ポリタイプ整合による4H-SiC(11-20)基板上の高品質4H-AlN
応用物理学会(2003年秋期)
   
7) 神谷慎一、小野島紀夫、須田淳、木本恒暢、松波弘之
6H-SiC基板上MBE成長におけるAlN緩衝層とGaN成長層の結晶性の関係
応用物理学会(2003年秋期)
   
8) 小野島紀夫、海藤淳司、須田淳、木本恒暢、松波弘之
rf-MBE法により形成したAlN/4H-SiC (0001) 界面の電子物性
応用物理学会(2003年秋期)
   
9) N. Onojima, J. Kaido, J. Suda, T. Kimoto and H. Matsunami
Towards High-Quality AlN/SiC Hetero-Interface by Controlling Initial Processes in Molecular-Beam Epitaxy
2003年シリコンカーバイドおよび関連材料に関する国際会議(International Conference on Silicon Carbide and Related Materials 2003, ICSCRM2003)
   
10) J. Suda, N. Onojima, T. Kimoto and H. Matsunami
Step-Flow or Layer-by-Layer Growth for AlN on SiC(0001) Substrates
Material Research Society Fall Meeting 2003
   
11) N. Onojima, J. Suda and H. Matsunami
Growth of high-quality non-polar AlN on 4H-SiC (11-20) substrate by molecular-beam epitaxy
physica status solidi (c) Volume 0, Issue 7, Pages: 2502-2505
   
12) N. Onojima, J. Suda and H. Matsunami
Impact of SiC surface control on initial growth mode and crystalline quality of AlN grown by molecular-beam epitaxy
physica status solidi (c) Volume?0, Issue?7, Pages:?2529-2532
   
13) Onojima N, Suda J, Kimoto T, Matsunami H
4H-polytype AlN grown on 4H-SiC(11-20) substrate by polytype replication
Appllied Physics Letters 83 (2003), 5208-5210.
   
14) N. Onojima, J. Suda and H. Matsunami
Growth of AlN (11(2)over-bar0) on 6H-SiC (11(2)over-bar0) by molecular-beam epitaxy
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS 41 (12A): L1348-L1350
   
15) 須田淳
Effect of surface control of SiC (0001) substrate on heteroepitaxial growth of AlN
日本学術振興会「結晶加工と評価技術」第145委員会 第99回研究会 「ワイドギャップ系半導体の結晶工学とデバイス」
   
16) 小野島紀夫、海藤淳司、須田淳、木本恒暢
Correlation between interface structure and electronic properties of AlN/4H-SiC(0001)
応用物理学会(2004年春期)
   
17) 中野佑紀、須田淳、木本恒暢
Direct growth of n-GaN on p-4H-SiC for GaN/SiC HBT
応用物理学会(2004年春期)
   
18) 堀田昌宏、小野島紀夫、須田淳、木本恒暢
CL measurement of AlN grown on 4H-SiC (0001) and (11-20)
応用物理学会(2004年春期)
   
19) N. Onojima, J. Kaido, J. Suda, T. Kimoto and H. Matsunami
Towards High-Quality AlN/SiC Hetero-Interface by Controlling Initial Processes in Molecular-Beam Epitaxy
Materials Science Forum vol.457-460: 1569-1572, 2004
   
20) Masahiro Horita, Norio Onojima, Jun Suda and Tsunenobu Kimoto
Cathodoluminescence study of AlN grown on 4H-SiC (11-20)
第23回電子材料シンポジウム(EMS-23)
   
21) Jun Suda, Norio Onojima and Tsunenobu Kimoto
Heteroepitaxial Growth of AlN on SiC - Stacking Mismatch
第23回電子材料シンポジウム(EMS-23)
   
22) N. Onojima, J. Kaido, J. Suda, T. Kimoto
Molecular-beam epitaxy of AlN on off-oriented SiC and demonstration of MISFET using AlN/SiC interface
窒化物半導体国際ワークショップ2004 International Workshop on Nitride Semiconductors 2004 (IWN2004)
   
23) Y. Nakano, J. Suda, T. Kimoto
Direct growth of GaN on off-oriented SiC (0001) by molecular-beam epitaxy for GaN/SiC heterojunction bipolar transistor
窒化物半導体国際ワークショップ2004 International Workshop on Nitride Semiconductors 2004 (IWN2004)
   
24) J. Suda, M. Horita, N. Onojima and T. Kimoto
Heteroepitaxial Growth of AlN on SiC
High-tech research technical meeting on Hybrid Nanostructured Materials and Its Applications 2004
   
25) 須田淳、木本恒暢
Control of interface properties of AlN/SiC and its application on AlN/SiC MISFET
応用電子物性分科会研究例会 「窒化アルミニウム―結晶・プロセス・デバイスの最前線―」
   
26) Jun Suda, Yuki Nakano and Tsunenobu Kimoto
Influence of Substrate Misorientation Angle and Direction in Molecular-Beam Epitaxial Growth of GaN on Off-Axis SiC
Material Research Society Fall Meeting 2004
   
27) J. Suda, M. Horita, N. Onojima and T. Kimoto
Heteroepitaxial Growth of AlN on SiC
Hybrid Nanostructured Materials and Their Applications, Eds. T. Ohachi, A. S. Somintac and M. Wada (ISBN4-9902429-0-4)
   
28) Robert Armitage, 須田淳、木本恒暢
Growth of Nonpolar GaN and AlN Epilayers on 4H-SiC (1-100) substrates
応用物理学会(2005年春期)
   
29) 中野佑紀、島田翔太、須田淳、木本恒暢
Fabrication and Characterization of GaN/SiC Hetero-junction Bipolar Transistors
応用物理学会(2005年春期)
   
30) N. Onojima, J. Kaido, J. Suda, T. Kimoto
Molecular-beam epitaxy of AlN on off-oriented SiC and demonstration of MISFET using AlN/SiC interface
physica status solidi (c) Volume 2, Issue 7, Pages: 2643-2646
   
31) Y. Nakano, J. Suda, T. Kimoto
Direct growth of GaN on off-oriented SiC (0001) by molecular-beam epitaxy for GaN/SiC heterojunction bipolar transistor
physica status solidi (c) Volume 2, Issue 7, Pages: 2208-2211
   
32) Masahiro Horita , Jun Suda and Tsunenobu Kimoto
Impact of III/V ratio on polytype and residual strain of AlN grown on 4H-SiC (11-20) substrate by molecular-beam epitaxy
第24回電子材料シンポジウム(EMS-24)
   
33) Masahiro Horita , Jun Suda and Tsunenobu Kimoto
Impact of III/V ratio on polytype and residual strain of AlN grown on 4H-SiC (11-20) substrate by molecular-beam epitaxy
第6回窒化物半導体国際会議 6th International Conference on Nitride Semiconductors (ICNS6)
   
34) R. Armitage, J. Suda and T. Kimoto
Growth of Nonpolar AlN and AlGaN on 4H-SiC (1-100) by Molecular Beam Epitaxy
第6回窒化物半導体国際会議 6th International Conference on Nitride Semiconductors (ICNS6)
   
※「PhaseT」= 2001〜2004 researcher
※「PhaseU」= 2002〜2005 researcher
※「PhaseV」= 2003〜2006 researcher
 
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