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  • 市川 結
  • 大北 英生
  • 大平 圭介
  • 岡本 晃一
  • 佐伯 昭紀
  • 沈 青
  • 當摩 哲也
  • 橘 泰宏
  • 田部 勢津久
  • 太野垣 健
  • 江 東林
  • 野瀬 嘉太郎
  • 丸本 一弘
  • 吉田 弘幸

瞬間結晶化によるガラス基板上への超高性能多結晶Si薄膜形成

大平 圭介

論文
  • K. Ohdaira,
    "Defect Termination of Flash-Lamp-Crystallized Large-Grain Polycrystalline Silicon Films by High-Pressure Water Vapor Annealing",
    Japanese Journal of Applied Physics (in press).
  • K. Ohdaira and H. Matsumura,
    "Liquid-phase explosive crystallization of electron-beam-evaporated a-Si films induced by flash lamp annealing",
    Journal of Crystal Growth, 362, 149-152, 2013.
  • K. Ohdaira and H. Matsumura,
    "Flash-Lamp-Induced Explosive Crystallization of Amorphous Germanium Films Leaving Behind Periodic Microstructures",
    Thin Solid Films, 524, 161-165, 2012.
  • K. Ohdaira, K. Sawada, N. Usami, S. Varlamov, and H. Matsumura,
    "Large-Grain Polycrystalline Silicon Films Formed through Flash-Lamp-Induced Explosive Crystallization",
    Japanese Journal of Applied Physics, 51, 10NB15 (2012).
  • Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, and Hideki Matsumura,
    "Polycrystalline Silicon Films with Nanometer-Sized Dense Fine Grains Formed by Flash-Lamp-Induced Crystallization",
    Journal of Nanoscience and Nanotechnology, 12, 591-595, 2012.
  • Keisuke Ohdaira, Naohito Tomura, Shohei Ishii, Keisuke Sawada, Hideki Matsumura,
    "Mechanism and control of crack generation in glass substrates during crystallization of a-Si Films by flash lamp annealing",
    Journal of Non-crystalline Solids, 358, 2154–2158, 2012.
  • Keisuke Ohdaira, Naohito Tomura, Shohei Ishii, and Hideki Matsumura,
    "Lateral Crystallization Velocity in Explosive Crystallization of Amorphous Silicon Films Induced by Flash Lamp Annealing",
    Electrochem. Solid-State Lett., 14, H372-H374, 2011.
  • Keisuke Ohdaira, Naohito Tomura, Shohei Ishii, and Hideki Matsumura,
    "Flash-lamp-crystallized polycrystalline silicon films with high hydrogen concentration formed from Cat-CVD a-Si films",
    Thin Solid Films, 519, 4459-4461, 2011.
  • Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, and Hideki Matsumura,
    "Microstructure of Polycrystalline Silicon Films Formed through Explosive Crystallization Induced by Flash Lamp Annealing",
    Japanese Journal of Applied Physics, 50, 04DP01, 2011.
  • Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, Hideki Matsumura,
    "Lateral Crystallization of Amorphous Silicon films Induced by Flash Lamp Annealing",
    Proceedings of the 7th Thin-Films Materials and Devices Meeting,110107015,2011.
  • T. Nishikawa, K. Ohdaira, and H. Matsumura,
    "Electrical Properties of Polycrystalline Silicon Films Formed from Amorphous Silicon Films by Flash Lamp Annealing",
    Current Applied Physics,11,604-607,2011.
  • Keisuke Ohdaira, Takuya Nishikawa, and Hideki Matsumura,
    "Variation of Crystallization Mechanisms in Flash-Lamp-Irradiated Amorphous Silicon Films",
    Journal of Crystal Growth, 312,2834-2839,2010.
  • Keisuke Ohdaira, Tomoko Fujiwara, Yohei Endo, Kazuhiro Shiba, Hiroyuki
    Takemoto, and Hideki Matsumura,
    "Selection of material for the back electrodes of thin-film solar cells using",
    Japanese Journal of Applied Physics, 49,04DP04,2010.
  • Keisuke Ohdaira, Hiroyuki Takemoto, Takuya Nishikawa, and Hideki Matsumura,
    "Flash-lamp-crystallized polycrystalline silicon films with remarkably long",
    Current Applied Physics, 10,S402-S405,2010.
口頭発表・ポスター発表
  • 大平圭介、松村英樹
    「フラッシュランプアニールによるa-Ge膜の結晶化」
    第60回応用物理学関係連合講演会、2012/3/11
  • 大平 圭介
    「瞬間結晶化によるガラス基板上への超高性能多結晶Si薄膜形成」
    JSTさきがけ「太陽光と光電変換機能」領域公開シンポジウム、2012/12/17
  • Keisuke Ohdaira,
    "Polycrystalline Silicon Films Formed by Flash Lamp Annealing for Solar Cell Application",
    The Collaborative Conference on Crystal Growth (3CG), 2012/12/11-14
  • Keisuke Ohdaira and Sergey Varlamov,
    "Photovoltaic effect of large-grain polycrystalline silicon films formed by flash lamp annealing",
    The 22nd international Photovoltaic Science and Engineering Conference (PVSEC-22), 2012/11/5-9
  • 大平 圭介、Sergey Varlamov
    「FLAにより形成した大粒径poly-Si膜の発電特性」
    第9回薄膜材料デバイス研究会、2012/11/2-3
  • Keisuke Ohdaira,
    "The control of the film stress of Cat-CVD a-Si films and its impact on explosive crystallization induced by flash lamp annealing",
    The 7th International Conference on Hot-Wire Chemical Vapor Deposition (HWCVD), 2012/10/8-12
  • Keisuke Ohdaira,
    "Defect Termination of Flash-Lamp-Crystallized Large-Grain Polycrystalline Silicon Films by High-Pressure Water Vapor Annealing",
    2012 International Conference on Solid State Devices and Materials (SSDM 2012), 2012/9/25-27
  • 大平 圭介, Sergey Varlamov
    「FLAによる大粒径poly-Si膜形成と結晶化におけるドーパント拡散」
    2012年 秋季 第73回応用物理学会学術講演会、2012/9/11-14
  • 大平 圭介
    「Cat-CVD a-Si膜の応力制御とフラッシュランプアニールでの結晶化機構への影響」
    第9回 Cat-CVD研究会、2012/6/22-23
  • Keisuke Ohdaira, Sergey Varlamov, Noritaka Usami, and Hideki Matsumura,
    "Formation of polycrystalline silicon films with μm-order-long grains through liquid-phase explosive crystallization by flash lamp annealing",
    38th IEEE Photovoltaic Specialists Conference, 2012/6/3-8
  • Keisuke Ohdaira and Hideki Matsumura,
    "Observation of Different Explosive Crystallization Modes in Sputtered, Evaporated, and Their Stacked a-Si Films",
    2012 MRS Spring Meeting, 2012/4/9-13.
  • Keisuke Ohdaira,
    "Formation of Polycrystalline Silicon Films for Solar Cells by Flash Lamp Annealing",
    JST さきがけ研究領域合同国際シンポジウム「人類の危機に挑む研究開発:光と太陽エネルギー」、2012/3/26-27
  • 大平圭介、松村英樹
    「FLA によるスパッタ/蒸着積層a-Si膜の結晶化」
    第59回応用物理学関係連合講演会、2012/3/15-18
  • Keisuke Ohdaira,
    "Formation of Polycrystalline Silicon Films by Rapid Crystallization",
    International Photovoltaic Young Scientist Symposium, 2011/12/5.
  • 大平圭介
    「フラッシュランプアニールによる太陽電池用多結晶シリコン薄膜形成」
    日本真空協会 2011年11月研究例会「太陽電池における革新技術の開発動向と将来展望」、2011/11/25
  • Keisuke Ohdaira, Keisuke Sawada, Noritaka Usami, Sergey Varlamov, and Hideki Matsumura
    "LARGE-GRAIN POLYCRYSTALLINE SILICON FILMS FORMED THROUGH FLASH-LAMP-INDUCED EXPLOSIVE CRYSTALLIZATION",
    21st International Photovoltaic Science and Engineering Conference (PVSEC-21), 2011/11/28-12/2.
  • 大平圭介、澤田恵佑、松村英樹
    「FLAによるa-Si膜の横方向結晶化における大粒径結晶粒形成」
    第8回薄膜材料デバイス研究会、2011/11/4-5
  • Keisuke Ohdaira and Hideki Matsumura
    "Formation of high-quality poly-Si films by flash lamp annealing",
    The International topical workshop on Subsecond thermal processing of Advanced Materials 2011 (subtherm-2011) 2011/10/25-27.
  • Keisuke Ohdaira and Hideki Matsumura
    "Flash-Lamp-Induced Explosive Crystallization of Amorphous Films Leaving Behind Periodic Microstructures",
    2011 International Conference on Solid State Devices and Materials (SSDM 2011), 2011/9/28-30.
  • Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, and Hideki Matsumura,
    "Impact of glass substrates on the properties of solar cells fabricated using flash-lamp-crystallized polycrystalline silicon films",
    The 26th European Photovoltaic Solar Energy Conference and Exhibition, 2011/9/5-9.
  • 大平圭介、澤田恵佑、 松村英樹、
    「FLA によるa-Si 膜の結晶化における横方向結晶化速度」
    2011年秋季 第72回 応用物理学会学術講演会、2011/8/29-9/2.
  • Keisuke Sawada, Shohei Ishii, Naohito Tomura, Keisuke Ohdaira, Hideki Matsumura,
    "Reduction in the Defect Density of Flash-Lamp-Crystallized Polycrystalline Silicon Films by Conventional Furnace Annealing",
    The 24th International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS 24), 2011/8/21-26.
  • Keisuke Ohdaira, Naohito Tomura, Shohei Ishii, Keisuke Sawada, Hideki Matsumura,
    "Mechanism and Control of Crack Generation in Glass Substrates during Crystallization of a-Si Films by Flash Lamp Annealing",
    The 24th International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS 24), 2011/8/21-26.
  • Keisuke Ohdaira and Hideki Matsumura,
    "Carrier Recombination Mechanisms in Solar Cells Fabricated Using
    Flash-Lamp-Crystallized Polycrystalline Silicon Films",
    International Conference on Materials for Advanced Technologies 2011 (The 5th Asian Conference on Crystal Growth and Crystal Technology), 2011/6/26-7/2.
  • Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, and Hideki Matsumura,
    "Carrier Recombination Mechanisms in Solar Cells Fabricated Using",
    The 37th IEEE Photovoltaic Specialists Conference, 2011/6/19-24.
  • 澤田恵佑、石井翔平、渡村尚仁、大平圭介、松村英樹、
    「フラッシュランプアニールにより形成したpoly-Si薄膜の欠陥密度低減化」
    第8回Cat-CVD研究会、2011/6/18-19
  • 大平圭介、松村英樹、
    「瞬間結晶化による太陽電池用多結晶シリコン薄膜形成」
    日本化学会第91春季年会、2011/3/26
  • 大平圭介、松村英樹、
    「フラッシュランプアニールによる非晶質シリコン膜の結晶化とその太陽電池応用」
    春季 第58回 応用物理学関係連合講演会、2011/3/9
  • 大平圭介、石井翔平、渡村尚仁、松村英樹、
    「フラッシュランプアニールによるa-Si膜の横方向結晶化」
    第7回薄膜材料デバイス研究会、2010/11/6-7
  • Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, and Hideki Matsumura,
    "Polycrystalline Silicon Films with Nanometer-Sized Dense Fine Grains Formed by Flash-Lamp-Induced Crystallization",
    5th Asian Conference on Nanoscience & Nanotechnology (AsiaNANO 2010), 2010/11/1-3.
  • Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, and Hideki Matsumura,
    "Microstructures of polycrystalline silicon films formed through explosive",
    2010 International Conference on Solid State Devices and Materials (SSDM 2010), 2010/9/22-24.
  • Keisuke Ohdaira, Naohito Tomura, Shohei Ishii, and Hideki Matsumura,
    "Flash-lamp-crystallized polycrystalline silicon films with high hydrogen concentration formed from Cat-CVD a-Si films",
    6th International Conference on Hot-Wire Chemical Vapor Deposition (Cat-CVD) Process, 2010/9/13-17.
  • Keisuke Ohdaira, Takuya Nishikawa, Shohei Ishii, Naohito Tomura, Koichi Koyama, and Hideki Matsumura,
    "Defect termination of flash-lamp-crystallized polycrystalline silicon films by undesorbed hydrogen atoms",
    5th World Conference on Photovoltaic Energy Conversion、2010/6/25.
  • Keisuke Ohdaira, Takuya Nishikawa, and Hideki Matsumura,
    "FLASH-LAMP-"INDUCED CRYSTALLIZATION OF AMORPHOUS SILICON FILMS IN DIFFERENT EXPLOSIVE CRYSTALLIZATION MODES",
    RENEWABLE ENERGY 2010, 2010/6/27-7/2.
  • Keisuke Ohdaira, Takuya Nishikawa, Shohei Ishii, Naohito Tomura, and Hideki Matsumura,
    "CARRIER TRANSPORT PROPERTIES OF FLASH-LAMP-CRYSTALLIZED POLY-SI FILMS",
    35th IEEE Photovoltaics Specialist Conference, 2010/6/20-25.
  • 大平圭介,西川拓也,石井翔平,渡村尚仁,松村英樹、
    「フラッシュランプアニールによるa-Si膜の横方向結晶化への前駆体構造の影響」
    2010年春季 第57回 応用物理学関係連合講演会、2010/3/18
出版物
その他
プレス発表
受賞
  • 大平圭介、
    第2回日豪若手研究者交流促進事業
    (2012年度)