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JST Press Release

August 24, 2017
Japan Science and Technology Agency (JST)
5-3, Yonbancho, Chiyoda-ku, Tokyo 102-8666

The development of break-through polishing pads, which dramatically improve the polishing process of difficult-to-process substrates

Japan Science and Technology Agency (President: Michinari HAMAGUCHI, M.D., Ph.D.) announced that it has recognized the result of the NexTEP(*) R&D project “the development of highly productive and precise polishing pads” as “accomplished”.

The seed technology of this project comes from the research activities of Professor Yasuhiro TANI, Department of Mechanical Engineering, Ritsumeikan University, and other professionals. JST consigned the commercialization project to Teijin Limited (President and CEO: Jun Suzuki). Teijin’s High Performance Fibers Business Unit conducted the project from October 2013 to March 2017. The Teijin High Performance Fibers Business Unit was reorganized into Teijin Frontier Co., Ltd. (President: Shinji Nikko) by an absorption-type company split in April 2017.

Materials such as silicon carbide (SiC) and gallium nitride (GaN) are highly expected to be used for energy-saving power semiconductors. However, due to their chemical and heat stability (SiC is approximately four times harder than silicon [Si]), productivity and cost for processing and finishing must be improved. The newly developed polishing pad can provide a high polishing rate, low roughness of surface, good flatness in polishing process, and is expected to expand the use of power semiconductors.

Program Information

JST NexTEP *(Newly extended Technology Transfer Program)

One of the JSTís most prestigious Industry-Academia collaboration programs. JST commissions a company to commercialize university patents that have high potential, but are also highly challenging. The university and JST provide the company with technical guidance and the necessary expenses, respectively. Once the development is successfully completed, the company repays the development expenses to JST.

Project Name: “Development of highly productive and precise polishing pads”


[About Research]
Masahiro Shinohara Functional Nonwoven & Products Section, Nonwoven Solution Department
Teijin Frontier Co., Ltd.
Tel:+81-6-6233-3822  Fax:+81-6-6233-5231

[About Press]
Corporate Communications, Teijin Limited
Tel: +81-3-3506-4055

[About Program]
Toshiya Ohtake and Akihide Sekiya
Department of Industrial-Academic Development, JST
Tel: +81-3-5214-8995 Fax: +81-3-5214-0017


JST, an integrated organization of science and technology in Japan, establishes an infrastructure for the entire process from the creation of knowledge to the return to the society. For more information, visit http://www.jst.go.jp/EN/