Proposal Papers for Policy Making and Governmental Action toward Low Carbon Society

LCS-FY2021-PP-14

Technological Issues and Future Prospects of the Next Generation Semiconductor Devices:
SiC Semiconductor Devises

Summary

 While a shift in the energy supply of electric power is underway worldwide as a result of the significant expansion of renewable energy introduction toward a low-carbon society, the demand for electric power is also increasing in line with the development of an information society. This trend is expected to expand further in the future. Power devices, especially SiC devices, are attracting significant attention reflecting the situation.

 The reason is that in addition to the excellent physical properties of SiC such as wide bandgap and high thermal conductivity, crystal manufacturing technology and device process technology are enriched among next-generation semiconductors.
 This report summarizes the current status and future forecast of the SiC device market, focusing on the automotive, energy, information and telecommunication, and industrial applications, along with the characteristics of SiC as a power device material. In fact, SiC devices are beginning to be put into practical use in automotive applications, but there is still a large gap with Si in terms of cost. In this report, the following policy recommendations are made.
 To further expand the use of SiC power devices, it is necessary to develop low-cost, highly efficient, and highly reliable device manufacturing technologies. For this purpose, it is important to develop SiC single-crystal fabrication technology with large diameter and low defect density, epitaxial film fabrication technology with low defect density and high efficiency, and defect control technology to identify defect structures that affect device characteristics and to clarify and control their formation process and behavior. In addition, in device process technology, significant improvement of MOSFET channel formation technology is also necessary.

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