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Associate Professor, Department of Precision Engineering, School of Engineering, The University of Tokyo |
| URL: http://www.pe.t.u-tokyo.ac.jp/ug/faculty/mimura.html |
Development of large-area surface figuring, measuring and repricateing methods at the nanometer level |
In this research, novel surface figuring, measuring and replicating methods are developed to create surfaces having both smoothness and figure accuracy at the nanometer level. The target surface area size is of the order of several tens millimeter. By replicating the fabricated nanometer-accuracy master surfaces with the same accuracy, efficient production of nanometer-order accurate surfaces will be realized. The developed technology will bring about breakthroughs in various reflective optics production fields. |
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