HOMEScholor>Takahiro Namazu

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【Research Theme】

Creation of instant wafer-bonding technique using self-propagating exothermic nano-capsule structures Takahiro Namazu

Takahiro Namazu

University of Hyogo, Graduate School of Engineering, Associate Professor

http://www.eng.u-hyogo.ac.jp/mse/mse12/index.html

The purpose of this study is to develop a new wafer-bonding technique using self-propagating exothermic nano-capsule structures. The exothermic structures that are created by integrating bottom-up into top-down processes are aluminum nano-particles coated with nickel nano-layer. When a pulse of energy is supplied to the AlNi structures, atomic diffusion is generated. An exchange from Al-Al and Ni-Ni bonds to Al-Ni bonds generates heat, and thermal diffusion occurs rapidly. We use the exothermic structures as a heat source for melting a solder instantly. This technique would be useful for semiconductor wafer-bonding with low energy and low cost.


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