【Research Theme】
Masaaki Ichiki
The University of Tokyo, Department of Precision Engineering, School of Engineering, Associate Professor
http://www.su.t.u-tokyo.ac.jp/en/index.html
The target of this research is to establish the packaging and microsystem technology for the next generation micro electronics devices and its manufacturing processes. We will clarify the high-dielectric constant thin film based on the lattice matching/mismatching techniques including its basic mechanisms. Release, transfer and bonding process will be the most essential factors in the proposed method.
