Research Director

Kazuya Masu

Tokyo Institute of Technology
President

Outline

The objective of this project is to explore novel functionalities of nano G (acceleration) sensing. At the device, circuit and module research fields we develop CMOS-MEMS heterogeneous integration process and multi-physics design platform for the miniaturization and low-power consumption of the inertial sensor. Furthermore, nano-G sensing is to be demonstrated. At the material research field, we control the mechanical characteristics of gold alloy that is used as proof mass of the inertia sensor on the basis of nano-crystallographic structure. At the application fields, we demonstrate the measurement and understanding of human-body dynamics for healthcare application, and explore the various nano-G industrial applications.

Collaborators